| Item | Typical Model | Typical Size (mm) | Product Features |
|---|---|---|---|
|
YS-1220 |
Fused Silica |
Φ150x100 |
Synthetic fused silica and quartz ingot for Semiconductor, based on a variety of synthetic quartz prepara- tion processes, has excellent different and stable physical and chemical properties: · ppb level impurity content · Controllable hydroxyl content (0.5-1000ppm)
It can fully meet the application needs of various processes in semiconductor, display panel and photovoltaic production |
|
Φ300x50 |
|||
|
400x400x50 |
|||
|
YS-2230/YS-1230 |
500x500x60 |
||
|
YS-1240 |
Φ1000x30 |
||
|
YW-1804/1806/1808/1812 |
Fused Silica / Quartz Wafer |
Φ150 ~ 300 Min Thickness：0.05 |
|
|
YSM-6025/YSM-6025R |
Photomask Substrate |
152.4x152.4x6.35 |
|
|
YR-1220 / YR-1230 / YR-1240 |
Fused Silica Rod |
Φ2 ~ 200 Max Length：3000 |
|
|
YT-2220 / YT-2230 |
Fused Silica Tube |
OD：15 ~ 450 WT：1.0 ~ 30 Max Length：2000 |
Typical lmpurities Content①（ppm）
|
Item |
Li |
Na |
K |
Mg |
Ca |
Cu |
Al |
Cr |
Fe |
Ti |
OH |
|---|---|---|---|---|---|---|---|---|---|---|---|
|
YS-1320 / YS-1220 |
≤0.001 |
≤0.003 |
≤0.001 |
≤0.001 |
≤0.001 |
≤0.001 |
≤0.003 |
≤0.001 |
≤0.001 |
≤0.005 |
<1 |
|
YS-2330 / YS-2230 |
≤0.001 |
≤0.005 |
≤0.005 |
≤0.005 |
≤0.005 |
≤0.001 |
≤0.005 |
≤0.001 |
≤0.001 |
≤0.008 |
<250 |
①Test Method: ICP-MS
|
Item |
Typical Size (mm) |
OH Content (ppm) |
Relative Refractive Index |
Metal Impurity Content (ppm) |
Product Characteristics |
|---|---|---|---|---|---|
|
YT-2120 / YT-2420 |
OD：Φ15 ~ 90 WT：1.0 ~ 30 Max Length：2000 |
≤ 1 |
— |
≤ 0.05 |
QUARTECS synthetic quartz tube, based on synthetic quartz preparation process and "non-contact method" pipe drawing process, has excellent and stable physical and chemical properties and geometric indicators： · Excellent optical transmittance from deep ultraviolet to near infrared · Controllable hydroxyl content (0.02-200ppm) · Refractive index can be customized (deeply fluorinated) NA=0.22 It can meet the stringent application requirements of quartz glass in optical fibre prefabrication, light source, medical, industrial and other industries. |
|
YT-2121 / YT-2421 |
≤ 1 |
-0.35% ~ 0 |
|||
|
YT-2110 / YT-2410 |
≤ 0.1 |
— |
|||
|
YT-2130 |
50 ~ 300 |
— |
|||
|
YT-1121* |
— |
≤ 1 |
-1.1% ~ 0 |
||
|
YR-1120 |
Fused Silica Rod |
≤ 1 |
— |
||
|
YR-1140 |
>1（customizable） |
— |
Geometric specifications and accuracy (unit: mm)
| Items | Substrate Tube | Small Jacket Tube | Large Jacket Tub |
|---|---|---|---|
| Outside Diameter(OD/mm) | 15 - 40 | 40 - 60 | 60 - 90 |
| Wall Thickness (WT/mm) | 1.0 - 10 | 2 - 15 | 10 - 30 |
| OD Tolerance(mm) | ± 0.80 | ± 0.80 | ± 2.00 |
| WT Tolerance(mm) | ± 0.30 | ± 0.30 | ± 3.00 |
| Ovality(mm) | ≤ 0.15 | ≤ 0.40 | ≤ 0.40 |
| Siding(mm) | ≤ 0.15 | ≤ 0.45 | ≤ 0.45 |
| CSA Deviation | ≤ 6.0% | ≤ 6.0% | ≤ 6.0% |
| Bow(mm/m) | ≤ 0.70 | ≤ 0.70 | ≤ 0.70 |
| Length(mm) | ≤ 2000 | ≤ 2000 | ≤ 2000 |
|
Item |
Typical Model |
Maxi Size (mm) |
OH Content (ppm) |
Optical Uniformity (ppm)① |
Stress Birefringenc (nm/cm)① |
Fringe class③ |
Fluore- scence④ |
Bubble② |
Impurities (ppb) |
Product Characteristics |
|---|---|---|---|---|---|---|---|---|---|---|
|
YS-1320 |
Fused Silica |
Φ600 |
<1 |
≤ 5 |
≤ 5 |
5 |
Light Blue |
0 |
≤ 100⑤ |
Synthetic quartz ingot for QUARTECS |
|
YS-2330 |
500x500 900x900 1400x550 |
<250 |
≤ 5 |
≤ 5 |
5 |
/ |
① For the light average and stress birefringence value, different grades of products can be provided according to demand
② Level 0 standard: the sum of the bubble cross section in every 100cm3 glass does not exceed 0.015mm², the maximum particle diameter meets 1/1*0.08
③ Stripe grade reference ISO-10110
④ Use 254nm pump lamp excitation
⑤ Standard value ≤100ppb, typical value ≤20ppb
|
Item |
S① |
H2 |
H3 |
H5 |
H10 |
|---|---|---|---|---|---|
|
YS-1320 |
≤ 1 |
≤ 2 |
≤ 3 |
≤ 5 |
≤ 10 |
|
YS-2330 |
≤ 1 |
≤ 2 |
≤ 3 |
≤ 5 |
≤ 10 |
① S class can be customized according to demand
② Different light levels, corresponding to the corresponding size, detailed indicators can be confirmed with the YOFC
|
Item |
Thermal Absorption Coefficient@1064nm(ppm/cm) |
|---|---|
|
YS-1320 |
<1 |
|
YS-2330 |
<3 |
Refractive Index①
| Line wavelength（nm） | Refractive Index | Line wavelength（nm） | Refractive Index | ||
|---|---|---|---|---|---|
| YS-2330 | YS-1320 | YS-2330 | YS-1320 | ||
|
194.2 |
1.55907 |
1.55903 |
632.8 |
1.45716 |
1.45711 |
|
365 |
1.47467 |
1.47462 |
643.8 |
1.45685 |
1.45679 |
|
404.6 |
1.46976 |
1.46970 |
656.3 |
1.45651 |
1.45646 |
|
435.8 |
1.46683 |
1.46678 |
706.5 |
1.45529 |
1.45523 |
|
479.9 |
1.46364 |
1.46359 |
852.1 |
1.45261 |
1.45256 |
|
486.1 |
1.46326 |
1.46322 |
1013.98 |
1.45039 |
1.45034 |
|
546.1 |
1.46022 |
1.46016 |
1529.6 |
1.44442 |
1.44436 |
|
587.6 |
1.45860 |
1.45855 |
1970.1 |
1.43873 |
1.43867 |
|
589.3 |
1.45854 |
1.45849 |
2325.4 |
1.43303 |
1.43297 |
①Test conditions: 20.0℃, 1atm atmospheric pressure, humidity 50.0%
Sellmeier Dispersion Constant of Sellmeier Equation
| Item |
B1 |
C1 |
B2 |
C2 |
B3 |
C3 |
B4 |
C4 |
|---|---|---|---|---|---|---|---|---|
| YS-2330 | 0.124307 | 0.006456 | 0.823954 | 0.006473 | 0.156097 | 0.017157 | 0.673277 | 74.923787 |
| YS-1320 | 0.112372 | 0.006311 | 0.811965 | 0.006294 | 0.179903 | 0.016600 | 0.697481 | 77.351514 |
Sellmeier Equation：n2-1=B1λ2/(λ2-C1)+B2λ2/(λ2-C2)+B3λ2/(λ2-C3)+B4λ2/(λ2-C4)，λ in μm
Mechanical Properties
| Item | Unit | Typical Data |
|---|---|---|
| Density | g/cm3 | 2.20 |
| Mohs Hardness |
- |
7 |
| Young's Modulus |
GPa |
74.20 |
| Modulus of Rigidity |
GPa |
31.22 |
| Poisson's Ratio |
- |
0.17 |
| Compressive Strength |
GPa |
0.113 |
| Tensile Strength |
MPa |
49 |
| Bending Strength |
MPa |
94.3 |
Electrical Properties
| Item | Unit | Data |
|---|---|---|
| Dielectric Constant (20°C, 500MHz) | - | 3.90 |
| Electrical Resistivity (20°C) | Ω·cm | 0.1*1018 |
| Dielectric Loss Angle (tanδ, 500MHz) |
- |
< 0.001 |
| Electrical Resistance | Ω | 8.0*1015 |
Hermal Properties
| Item | Unit | YS-1320 | YS-2330 |
|---|---|---|---|
| Strain Point (η=1014.5dPa·s) | °C | 1070 | 1000 |
| Annealing Point (η=1013dPa·s) | °C | 1200 | 1160 |
| Softening Point (η=107.6dPa·s) | °C | 1680 | 1620 |
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